Date: 2013-08-01

Linear Air-Bearing Stage Suits Precision Applications

Linear Air-Bearing Stage Suits Precision Applications


Offering travel up to 500 mm, ABL1500 incorporates active air preload on all air-bearing surfaces. Opposing thin-film pressure maintains bearing nominal gap tolerance, and linear encoder feedback provides sub-nanometer resolution. Fully active preload, degree of stiffness, and geometric characteristics meet scanning and inspection application requirements, and total lack of mechanical contact between moving elements eliminates maintenance concerns.

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